JMEMS Letters On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting better mass sensing performance in air. In this paper, frequency resolution (bias instability) a thermal-piezoresistive resonator operating air at room temperature is experimentally investigated. It found that dynamic range decreases when increasing bias direct current whereas rises. The measurement results indicate maximum 169k with 47.8 dB for 6.25 mA, minimum 11.3k 70.1 5.8 mA. Our work also shows amplitude instabilities are significantly lower due decrease high current. [2021-0250]